The correct answer is B. Silane gas (SiH4).
Silane gas is a chemical compound with the formula SiH4. It is a colorless, flammable gas that is used in the semiconductor industry to deposit polysilicon layers on silicon wafers. Polysilicon is a type of silicon that is used to make the gates of transistors.
Silicon nitride (Si3N4) is a ceramic material that is used in the semiconductor industry as a passivation layer and as a diffusion barrier. It is a white, non-flammable solid that is not soluble in water.
Silicon oxide (SiO2) is a glassy material that is used in the semiconductor industry as an insulator and as a
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